JPH0517705B2 - - Google Patents

Info

Publication number
JPH0517705B2
JPH0517705B2 JP63132517A JP13251788A JPH0517705B2 JP H0517705 B2 JPH0517705 B2 JP H0517705B2 JP 63132517 A JP63132517 A JP 63132517A JP 13251788 A JP13251788 A JP 13251788A JP H0517705 B2 JPH0517705 B2 JP H0517705B2
Authority
JP
Japan
Prior art keywords
contact
thin film
support member
membrane
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63132517A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644042A (en
Inventor
Jei Guruubu Hansu
Ii Garutsu Barudeisu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tektronix Inc
Original Assignee
Tektronix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tektronix Inc filed Critical Tektronix Inc
Publication of JPS644042A publication Critical patent/JPS644042A/ja
Publication of JPH0517705B2 publication Critical patent/JPH0517705B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP63132517A 1987-06-09 1988-05-30 Prober Granted JPS644042A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/059,903 US4912399A (en) 1987-06-09 1987-06-09 Multiple lead probe for integrated circuits in wafer form

Publications (2)

Publication Number Publication Date
JPS644042A JPS644042A (en) 1989-01-09
JPH0517705B2 true JPH0517705B2 (en]) 1993-03-09

Family

ID=22026029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63132517A Granted JPS644042A (en) 1987-06-09 1988-05-30 Prober

Country Status (4)

Country Link
US (1) US4912399A (en])
EP (1) EP0294939A3 (en])
JP (1) JPS644042A (en])
KR (1) KR890001174A (en])

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US5079501A (en) * 1990-07-10 1992-01-07 The United States Of America As Represented By The Secretary Of The Army Flexible membrane circuit tester
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JP6630117B2 (ja) * 2015-03-27 2020-01-15 株式会社ヨコオ コンタクトユニット及び検査治具
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JP7287250B2 (ja) * 2019-11-18 2023-06-06 三菱電機株式会社 試験装置及び試験方法
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Also Published As

Publication number Publication date
KR890001174A (ko) 1989-03-18
JPS644042A (en) 1989-01-09
EP0294939A3 (en) 1990-05-09
EP0294939A2 (en) 1988-12-14
US4912399A (en) 1990-03-27

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